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TC Wafer
제품설명
Outline
TC wafer is specialized for the semiconductor industry. We have bonding technology so the thermocouple sending junction can be stuck on a silicon wafer and it doesn’t come off.
Not only silicon wafer but also other material substrates can be available if the customer wants to measure the real temperature of the surface, contact PFK, and PFK will provide a solution.
Structure
| Wafer | ||
| Insulator | • Ceramic Sleeve (250℃ ~ 1000℃) • Quartz(850℃ ~ 1200℃) • Teflon/Polyimide(0~250℃), Fiber glass(0~ 450℃) | • Durability • Flexibility • Electric Insulation |
| Connector | ||
| Mini connector (Excellent accuracy), Pin connector • D-sub connector, banana plug, bare |
Specification
Wafer | |
Number of TC Points | •1~34pts, up to customer’s request |
T/C Type wire | •K (Accuracy : 0.4% of reading) •R (0.25% reading) •S (0.25% reading) |
TC Wire Diameter | 0.127mm (For RTP process 0.07mm is recommendable) |
Vacuum Feed Through | Kapton Tape will insulate and project TC wire and Vacuum rate 10 to -7torrcan be available |
Insulation Material | •Ceramic Sleeve (Max temp. 850℃) •Micro Quartz Tube(Max temp. 1,200℃) •Teflon(Max temp. 250℃) for RTP micro quartz tube is recommended |
Connectors | Mini Plug 2pin is most popular but other options can be requested by customer |
